SPT-3000 Top Supplier:

Oxford Applied Research LTD

Oxford Applied Research is a supplier of UHV and HV components and systems for the deposition and characterisation of thin films. OAR speciality lies in providing unique solutions to common deposition challenges.

Created over a quarter of a century ago, Oxford Applied Research has evolved from a contract R&D and technology licensing company into a manufacturer of leading-edge instruments for the scientific community. Milestone achievements include instruments enabling the first demonstration of solid-state blue LEDs and advances in HTc superconductor oxides, for which the company received the Queen's Award for Technological Achievement.

90% of turnover is exported, reflecting the global nature of scientific research and development.
The company's products address a variety of markets including surface science, advanced materials, semiconductors and nanotechnology. Some instruments are now being incorporated into OEM Production systems for opto-electronics, high k dielectric oxides and MBE.

Ion Milling System

Nanocluster Solutions

Oxford Applied Research supplies a number of products to meet the increasing demands of the nanoscience community. The nanocluster source can be used to deposit a wide range of clustered materials for applications ranging from research into the fundamental properties of nanoscale structures to industrial applications such as catalysis and highly adherent films.

Anti-microbial silver nanoclusters - The nanocluster research group at the University of Leicester, led by Professor Chris Binns, have demonstrated this property on a variety of bacteria using Oxford Applied Research's model NC200 cluster source.





In addition to the sources OAR can provide a quadrupole mass filter to size select and measure the cluster mass.

Nanocluster Deposition Systems - Nanodep60 - The Nanodep60 nanocluster deposition system from Oxford Applied Research is the first commercially available UHV system designed specifically for the deposition of nanoclusters. It can be used to produce metallic, semiconducting, magnetic and compound nanoclusters for a range of applications. Emerging applications include contact-hole filling, magnetic and optical data storage, catalysis, energetic cluster impact films and fundamental studies of nanoparticles.

The Nanodep60 incorporates the extensively developed NC200U nanocluster source and QMF200 quadrupole mass filter. The standard system configuration allows for optimal process flexibility and is tailored for deposition over 1cm2 substratres. It is suited for both soft-landing cluster and energetic cluster impact studies. The system includes pumping, an entry lock, a heated substrate holder, quartz crystal monitor, gauges, mass flow controllers and all power supplies. The main chamber provides for numerous entry ports.